JPH0272963U - - Google Patents
Info
- Publication number
- JPH0272963U JPH0272963U JP15339988U JP15339988U JPH0272963U JP H0272963 U JPH0272963 U JP H0272963U JP 15339988 U JP15339988 U JP 15339988U JP 15339988 U JP15339988 U JP 15339988U JP H0272963 U JPH0272963 U JP H0272963U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- charged particle
- sample
- particle analyzer
- same axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 239000002245 particle Substances 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims 4
- 230000001678 irradiating effect Effects 0.000 claims 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15339988U JPH0272963U (en]) | 1988-11-24 | 1988-11-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15339988U JPH0272963U (en]) | 1988-11-24 | 1988-11-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0272963U true JPH0272963U (en]) | 1990-06-04 |
Family
ID=31429203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15339988U Pending JPH0272963U (en]) | 1988-11-24 | 1988-11-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0272963U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007127637A (ja) * | 2005-10-28 | 2007-05-24 | Thermo Fisher Scientific Inc | 表面分析用分光装置と分析方法 |
-
1988
- 1988-11-24 JP JP15339988U patent/JPH0272963U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007127637A (ja) * | 2005-10-28 | 2007-05-24 | Thermo Fisher Scientific Inc | 表面分析用分光装置と分析方法 |